We have expertise in Bi-Layer Nanoimprint Lithography and Microelectronics Design and Fabrication.
Our facilities include a class 1000 cleanroom, Suss Mask Aligner, Nanoimprint Lithography, Bruker AFM, Bruker Dektak, RF Magnetron Sputtering Systems for Metals and Dielectrics, Autolab 500 E-beam Metal Evaporator and a Kulicke & Soffa Wire Bonder.
Some examples of our fabricated devices are shown below:
Combined Nanoimprint Lithography + Photolithography
Bi-Layer Nanoimprint Lithography
(note: a specific advantage of using the bi-layer approach is the ability to undercut the edge of the PMMA layer to improve lift-off )
Single Layer Nanoimprint Lithography
Si Wafer Diced Devices